JPH0415831U - - Google Patents

Info

Publication number
JPH0415831U
JPH0415831U JP5782790U JP5782790U JPH0415831U JP H0415831 U JPH0415831 U JP H0415831U JP 5782790 U JP5782790 U JP 5782790U JP 5782790 U JP5782790 U JP 5782790U JP H0415831 U JPH0415831 U JP H0415831U
Authority
JP
Japan
Prior art keywords
wafer
vapor deposition
deposition material
chamber
planetar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5782790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5782790U priority Critical patent/JPH0415831U/ja
Publication of JPH0415831U publication Critical patent/JPH0415831U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP5782790U 1990-05-30 1990-05-30 Pending JPH0415831U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5782790U JPH0415831U (en]) 1990-05-30 1990-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5782790U JPH0415831U (en]) 1990-05-30 1990-05-30

Publications (1)

Publication Number Publication Date
JPH0415831U true JPH0415831U (en]) 1992-02-07

Family

ID=31582889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5782790U Pending JPH0415831U (en]) 1990-05-30 1990-05-30

Country Status (1)

Country Link
JP (1) JPH0415831U (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07202349A (ja) * 1993-12-14 1995-08-04 Korea Electron Telecommun Ｍｂｅ材結晶成長の分子線回折を利用した量子細線レーザーダイオードの製造方法
KR100934073B1 (ko) * 2002-07-04 2009-12-24 독키 가부시키가이샤 증착장치 및 박막제작방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6215566B2 (en]) * 1976-10-19 1987-04-08 Kao Corp

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6215566B2 (en]) * 1976-10-19 1987-04-08 Kao Corp

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07202349A (ja) * 1993-12-14 1995-08-04 Korea Electron Telecommun Ｍｂｅ材結晶成長の分子線回折を利用した量子細線レーザーダイオードの製造方法
KR100934073B1 (ko) * 2002-07-04 2009-12-24 독키 가부시키가이샤 증착장치 및 박막제작방법

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